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SEMI E29-93 (Reapproved 0710)
SEMI C64-0308 (first published)
SEMI C3 — Specifications for Gases
orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。
1-0414 - EQUIPMENT SELF DESCRIPTION(EqSD)의 SOAP 바인딩 규격
E12800 - SEMI E128 - XML メッセージ構造に関する仕様 Revision:SEMI E128-0706E - Superseded SEMI E29-93 (Reapproved 0710)global Information & Control Committee20091216global Audits and Reviews Subcommittee20102www. semi. org2003720067 XMLSEMIXMLXMLXMLXMLXML XML2 XMLXMLSEMI XML W3C Simple Object Access ProtocolSOAP SEMISOAP SOAP SOAP 2 XMLXMLXML Referenced SEMI Standards SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E134 Specification for Data Collection Management
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